Multi-channel detector for faster elemental and chemical imaging
Angle dependent technology for +/- 5 degree solid angle collection for ADXPS measurements.
Micro-focused, scanning x-ray source which provides excellent large area and superior micro-area spectroscopy performance.
Spectroscopy, depth profiling and imaging can all be performed over the full range of x-ray beam sizes including the minimum x-ray beam size of less than 10 µm.
Micro-focused, raster scanned x-ray beam
X-ray beam induced secondary electron imaging XPS - images with spectra at each pixel for retrospective chemical analysis
