Electron Spectroscopy for Chemical Analysis
Technique(s)
XPS
XPS Imaging
AES
ISS
UPS
High Pressure Gas Cell
Depth Profiling with Ar+ gun
Charge Compensation for Insulating Samples
BASIC SPECIFICATIONS
Electron Analyzer
- Double-focusing full 180° spherical sector analyzer
- Magnetic and multi-element electrostatic input lenses
- Multi-channel spectroscopic detector
- 3 micron resolution 2-D image detector
Microfocused Monochromated
- AlKα X-ray Source
- 0.5 meter Rowland circle
- Microfocused electron gun
- Multi-position aluminum anode
- Two toroidal quartz crystals
Flood Gun
- Charge compensation
- Digital control
- Electron imaging
Ion Source
- Digital control
- Depth profiling
- Sample cleaning
- Secondary electron imaging
- ISS
Automated 4-axis Sample Manipulator
- Interfaced to the data system
Avantage Software for Data Acquisition and Analysis
- Instrument control
- Data acquisition and processing, peak fitting
- Multi-sample, multi-point data acquisition
- Unattended data acquisition
Sample Options
- 5-axes sample manipulator
- Sample heating and cooling
UV Photoelectron Spectroscopy (UPS)
- High intensity UV lamp
- Helium gas admission system
95nm-resolution AES/SEM/SAM Electron Gun
- Schottky type field emission source
- SEM detector
High Sensitivity
The combination of high efficiency lenses and detectors on ESCALAB 250 ensure the highest sensitivity in X-ray photoelectron spectroscopy (XPS) applications.
- High speed acquisition
- Excellent sensitivity with spatial resolution
- 106 counts/s in normal operating conditions (0.6 eV at FWHM, Ag sample)
- Maximum chemical detectability
Energy Resolution
ESCALAB 250 provides excellent energy resolution by combining an advanced analyzer design with a twin crystal microfocusing X-ray monochromator.
- Identification and quantification of chemical states
- Resolve interfaces and overlapping peaks
Fast Parallel Imaging XPS
Parallel imaging produces faster data acquisition with about 3-micron XPS resolution for chemical images. ESCALAB 250 is the instrument to use the same input lens and analyzer for both parallel imaging and spectroscopy.
- Imaging of both large and small features
- Eliminates the need to align two sets of electron optics
Auger Electron Spectroscopy
- 95 nm spot size at 5 nA
- SEM and SAM imaging
Small Area XPS (SAXPS)
- defined by x-rays gun small area from 120μm to 650μm
- Possible Lens defined small area down to < 20 μm
Insulators
Insulating samples are analyzed using charge compensation with e- and Ar+ flood guns.
Sample Preparation
Samples should be less than 14mm, preferred size is about 3-5mm. The sample thickness should be less than 3mm.