Electron Spectroscopy for Chemical Analysis

Image of ThermoFisher ESCAlab 250

Technique(s)

XPS
XPS Imaging
AES
ISS
UPS
High Pressure Gas Cell
Depth Profiling with Ar+ gun
Charge Compensation for Insulating Samples

BASIC SPECIFICATIONS

Electron Analyzer

  • Double-focusing full 180° spherical sector analyzer
  • Magnetic and multi-element electrostatic input lenses
  • Multi-channel spectroscopic detector
  • 3 micron resolution 2-D image detector

Microfocused Monochromated

  • AlKα X-ray Source
  • 0.5 meter Rowland circle
  • Microfocused electron gun
  • Multi-position aluminum anode
  • Two toroidal quartz crystals

Flood Gun

  • Charge compensation
  • Digital control
  • Electron imaging

Ion Source

  • Digital control
  • Depth profiling
  • Sample cleaning
  • Secondary electron imaging
  • ISS

Automated 4-axis Sample Manipulator

  • Interfaced to the data system

Avantage Software for Data Acquisition and Analysis

  • Instrument control
  • Data acquisition and processing, peak fitting
  • Multi-sample, multi-point data acquisition
  • Unattended data acquisition

Sample Options

  • 5-axes sample manipulator
  • Sample heating and cooling

UV Photoelectron Spectroscopy (UPS)

  • High intensity UV lamp
  • Helium gas admission system

95nm-resolution AES/SEM/SAM Electron Gun

  • Schottky type field emission source
  • SEM detector

High Sensitivity

The combination of high efficiency lenses and detectors on ESCALAB 250 ensure the highest sensitivity in X-ray photoelectron spectroscopy (XPS) applications.

  • High speed acquisition
  • Excellent sensitivity with spatial resolution
  • 106 counts/s in normal operating conditions (0.6 eV at FWHM, Ag sample)
  • Maximum chemical detectability

Energy Resolution

ESCALAB 250 provides excellent energy resolution by combining an advanced analyzer design with a twin crystal microfocusing X-ray monochromator.

  • Identification and quantification of chemical states
  • Resolve interfaces and overlapping peaks

Fast Parallel Imaging XPS

Parallel imaging produces faster data acquisition with about 3-micron XPS resolution for chemical images. ESCALAB 250 is the instrument to use the same input lens and analyzer for both parallel imaging and spectroscopy.

  • Imaging of both large and small features
  • Eliminates the need to align two sets of electron optics

Auger Electron Spectroscopy

  • 95 nm spot size at 5 nA
  • SEM and SAM imaging

Small Area XPS (SAXPS)

  • defined by x-rays gun small area from 120μm to 650μm
  • Possible Lens defined small area down to < 20 μm

Insulators

Insulating samples are analyzed using charge compensation with e- and Ar+ flood guns.

Sample Preparation

Samples should be less than 14mm, preferred size is about 3-5mm. The sample thickness should be less than 3mm.