Thermofisher ESCALab 250

Electron Spectroscopy for Chemical Analysis

Technique(s)

XPS
XPS Imaging
AES
ISS
UPS
High Pressure Gas Cell
Depth Profiling with Ar+ gun
Charge Compensation for Insulating Samples

Scheduler

FORCE

BASIC SPECIFICATIONS

Electron Analyzer

• Double-focusing full 180° spherical sector analyzer
• Magnetic and multi-element electrostatic input lenses
• Multi-channel spectroscopic detector
• 3 micron resolution 2-D image detector

Microfocused Monochromated

• AlKα X-ray Source
• 0.5 meter Rowland circle
• Microfocused electron gun
• Multi-position aluminum anode
• Two toroidal quartz crystals

Flood Gun

• Charge compensation
• Digital control
• Electron imaging

Ion Source

• Digital control
• Depth profiling
• Sample cleaning
• Secondary electron imaging
• ISS

Automated 4-axis Sample Manipulator

• Interfaced to the data system

Avantage Software for Data Acquisition and Analysis

• Instrument control
• Data acquisition and processing, peak fitting
• Multi-sample, multi-point data acquisition
• Unattended data acquisition

Sample Options

• 5-axes sample manipulator
• Sample heating and cooling

UV Photoelectron Spectroscopy (UPS)

• High intensity UV lamp
• Helium gas admission system

95nm-resolution AES/SEM/SAM Electron Gun

• Schottky type field emission source
• SEM detector

High Sensitivity

The combination of high efficiency lenses and detectors on ESCALAB 250 ensure the highest sensitivity in X-ray photoelectron spectroscopy (XPS) applications.

• High speed acquisition
• Excellent sensitivity with spatial resolution
• 106 counts/s in normal operating conditions (0.6 eV at FWHM, Ag sample)
• Maximum chemical detectability

Energy Resolution

ESCALAB 250 provides excellent energy resolution by combining an advanced analyzer design with a twin crystal microfocusing X-ray monochromator.

• Identification and quantification of chemical states
• Resolve interfaces and overlapping peaks

Fast Parallel Imaging XPS

Parallel imaging produces faster data acquisition with about 3-micron XPS resolution for chemical images. ESCALAB 250 is the instrument to use the same input lens and analyzer for both parallel imaging and spectroscopy.

• Imaging of both large and small features
• Eliminates the need to align two sets of electron optics

Auger Electron Spectroscopy

• 95 nm spot size at 5 nA
• SEM and SAM imaging

Small Area XPS (SAXPS)

• defined by x-rays gun small area from 120μm to 650μm
• Possible Lens defined small area down to < 20 μm

Insulators

Insulating samples are analyzed using charge compensation with e- and Ar+ flood guns.

Sample Preparation

Samples should be less than 14mm, preferred size is about 3-5mm. The sample thickness should be less than 3mm.