TECHNIQUE(S)

Optical imaging

BF

DF

Extended depth of field (EDF) imaging

Live video recording

Polarization techniques

Specimen heating/cooling 120°C/-5°C

 

SCHEDULER

FORCE

BASIC SPECIFICATIONS

High vacuum mode (HV)

Resolution (SEI, accelerating voltage 30 kV, WD 6mm): 5.0 nm

Magnification: 25x to 300,000x

Image modes: SEI, BEI

Probe current: 1pA to 1uA

 

Low vacuum mode (LV)

Resolution (BEI, Accelerating voltage 30 kV, WD 8 mm): 10 nm

Chamber pressure: 10 to 270 Pa

Lowest pressure: 1Pa

Image mode: Three kinds of BEI (Composition image, Topographic image and Shaded image)

 

Electron gun: Accelerating voltage: 0.5 to 30 kV

Filament: Tungsten hairpin filament

Alignment: Electromagnetic 2-stage deflection type

Manual and auto gun alignment

Beam blanking

Motorized X,Y control

Manual Z, Tilt, rotation

Maximum Specimen size: 6 inch (152mm)

 

LIBRA® 120 PLUS Basic Specifications

 

We recommend using Hitachi style Accessories, since they can be used on both of the SEMs.

PICTURE TO BE UPDATED

JEOL JSM-5610LV

Scanning Electron Microscope

Nanomaterials Core Characterization Facility

620 West Cary Street

Richmond, Virginia 23284

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